Piezoelectric Linear Stages | SIMTRUM Photonics Store

Piezo Nano Linear Stage are precision motion platforms based on piezoelectric ceramics as the driving source, combined with flexure hinge mechanisms to achieve multi-dimensional precision movement up to six axes. Driving methods include direct-drive mechanisms and amplified mechanisms. The motion range can reach the millimeter level, featuring a compact size, zero friction, and rapid response. By adding high-precision sensors, closed-loop operation can be further realized, achieving nanometer-level positioning accuracy and resolution.

SIMTRUM provides a series of nanoscale piezoelectric linear stages, including X-axis, Z-axis, XY-axis, XZ-axis, and XYZ-axis. These are suitable for various application scenarios such as biotechnology, precision control, and surface structural analysis. Additionally, select models support vacuum and non-magnetic versions.

Features

Nanoscale high resolution and positioning accuracy
Millisecond-level fast response speed
Closed-loop control with high repeatability positioning accuracy
Frictionless flexure hinge guiding structure

Applications

Scanning/Confocal microscopy
Nano-manipulation and nanoimprinting
Laser interference and optical path adjustment
CCD image processing
Biotechnology/AFM (Atomic Force Microscopy)
Optical communication and precision metrology

Piezoelectric linear translation stage

Piezoelectric Linear Translation Stage

The following chart presents the basic coverage data of different series of piezoelectric nano linear translation stages provided by SIMTRUM. For detailed specifications, please refer to the Specifications page for further inquiry according to your requirements

Series	DOF	Travel Range(μm)	Resolution(nm)	Repeatability(%F.S.)	Linearity(%F.S.)	Resonant Freq.(kHz)	Load Capacity(kg)
X-axis Piezo Linear Stage	X	2.4-250	Open: 0.1-2 / Closed: 0.5-7	0.01-0.25	0.05-0.5	0.3-12	Horiz: 0.5-10 / Vert: 0.3-5
Z-axis Piezo Linear Stage	Z	6.8-1000	Open: 0.1-4 / Closed: 0.2-35	0.02-0.5	0.05-0.5	0.12-2.5	Horiz: 0.5-2.5 / Vert: 0.02-1.5
XY-axis Piezo Linear Stage	XY	6.8-200	Open: 0.1-0.5 / Closed: 0.2-10	0.05-0.25	0.1-0.4	0.6-2.5	Horiz: 0.5-8 / Vert: 0.05-0.5
XZ-axis Piezo Linear Stage	XZ	6.8-430	Open: 0.1-2 / Closed: 0.2-15	0.025-0.25	0.07-0.4	0.155-2.5	Horiz: 0.5-80 / Vert: 0.05-10
XYZ-axis Piezo Linear Stage	XYZ	6.8-500	Open: 0.1-1.5 / Closed: 0.2-18	0.006-0.25	0.007-0.4	0.08-1.2	Horiz: 0.4-1 / Vert: 0.02-0.5
Special Scenario Linear Stage	X/Z/XYZ	8-500	Open: 0.1-7 / Closed: 0.5-18	0.01-0.15	0.01-0.5	0.08-3.3	Horiz: 5-80 / Vert: 0.1-5

Principle of Operation

The core driving source of the positioning stage is Piezoelectric Ceramics (stack actuators in some models), which operate based on the "Converse Piezoelectric Effect":

When the controller outputs a specific voltage (typically 0–150V, up to 1000V for high-voltage models), the ceramic produces micro-mechanical deformation proportional to the voltage.
This deformation serves as the primary motive power, which is either directly transmitted or mechanically amplified to achieve the target travel range.
The high-response characteristics (frictionless, zero backlash) ensure millisecond or sub-millisecond response speeds.

Mechanical Structure Selection

Amplified Mechanism Design

Designed for long-travel requirements. Flexure hinges amplify the micro-deformation of the ceramic by several to dozens of times, achieving travel ranges exceeding 100μm.
The integrated flexure hinge structure, optimized via Finite Element Analysis (FEA), eliminates mechanical clearance and friction, ensuring high stiffness and load capacity.

Direct-Drive Mechanism Design

Ideal for ultra-high precision and short-travel scenarios. The ceramic directly drives the platform without amplification, minimizing transmission errors.
Offers exceptional resolution ranging from 0.1nm to 0.5nm.

Open and Closed Loop Control

The system achieves precision control through "Drive-Detect-Feedback" loops or simplified open-loop configurations:

Open-loop Control
- Logic: The controller outputs signals based on preset voltage-displacement curves without real-time position detection.
- Application: Suitable for scenarios with lower requirements for repeatability; resolution is typically 1–5nm.
Closed-loop Control
- Logic: Integrated high-precision sensors detect actual platform displacement in real-time.
- Feedback: Sensors convert displacement into electrical signals for the controller to dynamically adjust voltage, eliminating hysteresis, creep, and thermal drift.

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	Availability	Reference Price (USD)
OM-PTS-T2-100-1-0.8-K Piezo Nano Linear Stage, Z-axis, Stroke 100 μm, Resonant Frequency 0.7 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T2-100-3-0.8-S Piezo Nano Linear Stage, Z-axis, Stroke 100 μm, Resonant Frequency 0.7 kHz, Resolution 3 nm, Close Loop	6-8 weeks	Request for quote
OM-PTS-T1-2.4-0.5-1-K Piezo Nano Linear Stage, X-axis, Stroke 2.4 μm, Resonant Frequency 0.7 kHz, Resolution 0.5 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T1-100-1-0.8-K Piezo Nano Linear Stage, X-axis, Stroke 100 μm, Resonant Frequency 0.3 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T1-100-3-0.8-S Piezo Nano Linear Stage, X-axis, Stroke 100 μm, Resonant Frequency 0.3 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T1-200-2-0.5-K Piezo Nano Linear Stage, X-axis, Stroke 200 μm, Resonant Frequency 0.3 kHz, Resolution 2 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T1-200-5.5-0.5-S Piezo Nano Linear Stage, X-axis, Stroke 200 μm, Resonant Frequency 0.3 kHz, Resolution 5.5 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T3-100-1-0.7-K Piezo Nano Linear Stage, XY-axis, Stroke 100 μm, Resonant Frequency 0.2 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T3-100-3-0.7-S Piezo Nano Linear Stage, XY-axis, Stroke 100 μm, Resonant Frequency 0.2 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T3-30-0.5-5-K Piezo Nano Linear Stage, XY-axis, Stroke 30 μm, Resonant Frequency 0.9 kHz, Resolution 0.5 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T3-30-1-5-S Piezo Nano Linear Stage, XY-axis, Stroke 30 μm, Resonant Frequency 0.9 kHz, Resolution 1 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T5-100-1-0.6-K Piezo Nano Linear Stage, XYZ-axis, Stroke 100 μm, Resonant Frequency 0.2 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T5-100-3-0.6-S Piezo Nano Linear Stage, XYZ-axis, Stroke 100 μm, Resonant Frequency 0.2 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T5-30-0.5-1-K Piezo Nano Linear Stage, XYZ-axis, Stroke 30 μm, Resonant Frequency 0.6 kHz, Resolution 0.5 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T5-30-1-1-S Piezo Nano Linear Stage, XYZ-axis, Stroke 30 μm, Resonant Frequency 0.6 kHz, Resolution 1 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T4-100-1-0.7-K Piezo Nano Linear Stage, XZ-axis, Stroke 100 μm/axis, Resonant Frequency 0.2 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T4-100-3-0.7-S Piezo Nano Linear Stage, XZ-axis, Stroke 100 μm/axis, Resonant Frequency 0.2 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T4-30-0.5-1-K Piezo Nano Linear Stage, XZ-axis, Stroke 30 μm/axis, Resonant Frequency 1.5 kHz, Resolution 0.5 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T4-30-1-1-S Piezo Nano Linear Stage, XZ-axis, Stroke 30 μm/axis, Resonant Frequency 1.5 kHz, Resolution 1 nm, Closed Loop	6-8 weeks	Request for quote
OM-PTS-T2-200-2-0.5-K Piezo Nano Linear Stage, Z-axis, Stroke 200 μm, Resonant Frequency 0.18 kHz, Resolution 2 nm, Open Loop	6-8 weeks	Request for quote
OM-PTS-T2-200-5.5-0.5-S Piezo Nano Linear Stage, Z-axis, Stroke 200 μm, Resonant Frequency 0.18 kHz, Resolution 5.5 nm, Closed Loop	6-8 weeks	Request for quote

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Piezoelectric Linear Stages | SIMTRUM Photonics Store

Principle of Operation

Mechanical Structure Selection

Amplified Mechanism Design

Direct-Drive Mechanism Design

Open and Closed Loop Control

OM-PTS-T2-200-5.5-0.5-S - Parameter

OM-PTS-T2-200-2-0.5-K - Parameter

OM-PTS-T4-30-1-1-S - Parameter

OM-PTS-T4-30-0.5-1-K - Parameter

OM-PTS-T4-100-3-0.7-S - Parameter

OM-PTS-T4-100-1-0.7-K - Parameter

OM-PTS-T5-30-1-1-S - Parameter

OM-PTS-T5-30-0.5-1-K - Parameter

OM-PTS-T5-100-3-0.6-S - Parameter

OM-PTS-T5-100-1-0.6-K - Parameter

OM-PTS-T3-30-1-5-S - Parameter

OM-PTS-T3-30-0.5-5-K - Parameter

OM-PTS-T3-100-3-0.7-S - Parameter

OM-PTS-T3-100-1-0.7-K - Parameter

OM-PTS-T1-200-5.5-0.5-S - Parameter

OM-PTS-T1-200-2-0.5-K - Parameter

OM-PTS-T1-100-3-0.8-S - Parameter

OM-PTS-T1-100-1-0.8-K - Parameter

OM-PTS-T1-2.4-0.5-1-K - Parameter

OM-PTS-T2-100-3-0.8-S - Parameter

OM-PTS-T2-100-1-0.8-K - Parameter

OM-PTS-T2-200-5.5-0.5-S - Download

OM-PTS-T2-200-2-0.5-K - Download

OM-PTS-T4-30-1-1-S - Download

OM-PTS-T4-30-0.5-1-K - Download

OM-PTS-T4-100-3-0.7-S - Download

OM-PTS-T4-100-1-0.7-K - Download

OM-PTS-T5-30-1-1-S - Download

OM-PTS-T5-30-0.5-1-K - Download

OM-PTS-T5-100-3-0.6-S - Download

OM-PTS-T5-100-1-0.6-K - Download

OM-PTS-T3-30-1-5-S - Download

OM-PTS-T3-30-0.5-5-K - Download

OM-PTS-T3-100-3-0.7-S - Download

OM-PTS-T3-100-1-0.7-K - Download

OM-PTS-T1-200-5.5-0.5-S - Download

OM-PTS-T1-200-2-0.5-K - Download

OM-PTS-T1-100-3-0.8-S - Download

OM-PTS-T1-100-1-0.8-K - Download

OM-PTS-T1-2.4-0.5-1-K - Download

OM-PTS-T2-100-3-0.8-S - Download

OM-PTS-T2-100-1-0.8-K - Download

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