Single Axis Motorized Piezo Stage
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0-25mm, 90°,180°,360°
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0.3, 0.5, 1.3, 1.5, 1 ,2 ,3, 3.5(5), 5
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20mm/s ,50mm/s, 50(Open Loop)mm/s, 100mm/s, 100 (Open Loop)mm/s, ＞20°/s, 30°/s, 60°/s, 360(Open Loop)°/s
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3um, 50nm, 300nm, 0.0005°，0.001°， ＜0.0001°
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+/-5um, +/-100nm，+/-200nm,+/-500nm,
+/-0.002°, +/-0.0005°
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XY Motorized Piezo Stages
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50*25mm, 50*50mm,
75*75mm, 105*105mm
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1, 2, 3, 5, 10
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50mm/s, 100mm/s,
100(Open Loop)/s
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20nm(50,100nm for option), 50nm
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+/-200nm
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