Single Axis Motorized Piezo Stage
SIMTRUM offers a wide range of motorized piezo stage, including linear piezo stage, vertical piezo stage, rotation piezo stage, piezo pitch and yaw platform, piezo objective scanner.
| Product |
Travel Distance |
Maximum Load Capacity(KG) |
Maximum Speed |
Minimum Step Size |
Repeatability |
Linear Piezo Stage
|
10mm,13mm,18mm,20mm,25mm
|
0.3, 0.5, 1, 2
|
100mm/s, 100 (Open Loop)mm/s
|
3um, 50nm, 300nm
|
+/-5um, +/-200nm, +/-500nm
|
| Vertical Piezo Stage |
±2.5mm,6mm,±6mm,±12.5mm |
0.5, 1.5, 2, 3 |
20mm/s, 50mm/s, 100mm/s |
50nm |
+/-100nm, +/-200nm |
| Rotation Piezo Stage |
90°,180°,360° |
1.5, 3,5 |
30°/s, 60°/s, 360(Open Loop)°/s |
0.0005°, 0.001° |
+/-0.002° |
| Peizo Pitch and Yaw Platform |
±7mm,±5mm |
2 |
＞20°/s |
＜0.0001° |
+/-0.0005° |
Piezo Objective Scanner
|
6mm,10mm,20(3)mm
|
0.5, 1.3, 3.5(5）
|
50(Open Loop)mm/s, >100mm/s,
100(Open Loop)mm/s
|
50nm
|
+/-200nm
|
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