Motorized Piezo Stage(high-precision)
SIMTRUM offers a comprehensive range of Motorized Piezo Stage(high-precision), enabling multi-dimensional motion control for single-axis (X/Z), dual-axis (XY/XZ), triple-axis (XYZ)) configurations. These stages feature linear travel ranges spanning from 2.4 μm to 1000 μm, with resolutions as fine as 0.003 μrad (angular) and 0.1 nm (linear), and load capacities ranging from 0.1 kg to 80 kg. Select models also support vacuum-compatible and non-magnetic designs.
They satisfy the nanometer-scale precision positioning and adjustment requirements of diverse applications, including biotechnology, precision control, surface structure analysis, infrared thermal imaging, large-aperture interferometry, laser beam scanning, laser beam combining, microelectronics precision machining, and wafer inspection. As such, they serve as ideal complementary equipment for high-end precision testing, manufacturing, and laboratory environments.
Piezo Nanopositioning Stage Series Parameters Distribution Table
| Product Series |
Axis Count & Axis Combination Options |
Travel Range |
Resolution Distribution |
Load Capacity (kg) Distribution |
No-load Resonant Frequency Distribution |
| Piezo Nano Linear Stage |
Single-axis (X, Z), Dual-axis (XY, XZ), Three-axis (XYZ) |
Linear: 2.4–1000 μm |
Open-loop: 0.1–7 nm
Closed-loop: 0.2–35 nm |
Horizontal: 0.4–80
Vertical: 0.02–10 |
0.08–12 kHz |
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