Motorized Piezo Stage

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SIMTRUM offers a wide range of motorized piezo stage, including single axis motorized piezo stage, multi axis motorized piezo stages.

Product	Travel Distance	Max. Load Capacity	Max. Speed	Min. Step Size	Repeatability
Single Axis Motorized Piezo Stage	0 ~ 25 mm 90° ~ 360°	0.3 ~ 5 kg	20 ~ 100 mm/s ＞20°/s ~ 360°/s	50nm ~ 3um ＜0.0001° ~ 0.001°	± 100nm ~ ± 5um ± 0.0005° ~ ± 0.002°
XY Motorized Piezo Stages	50 x 25 mm ~ 105 x 105 mm	1 ~ 10 kg	50 ~ 100 mm/s	20 ~ 100nm	± 200nm
Multi Axis Motorized Piezo Stages	± 6 ~ ± 25 mm ± 5° ~ ± 6° (Customizable)	0.15 ~ 10 kg (Customizable)	20 ~ 50 mm/s (Customizable)	50 - 200 nm 0.0002° ~ 0.0005° (Customizable)	± 200 ~ ± 300nm ± 0.0004° ~ ± 0.0005° (Customizable)
XY Microscope Piezo Stages	75 x 50 mm ~ 110 x 75 mm	1 kg	100 mm/s	20 ~ 100 nm	± 200nm
Vacuum Non-magnetic Piezo Stage	18 ~ 70 mm	1 ~ 10 kg	100 mm/s	150 ~ 300 nm	± 500
Nano Electric Actuator	12 mm	1.5 kg	0.5 mm/s	30 nm	/

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