Piezo Nano Hollow Stage

We have classified all products according to their axis direction and axis number.

For further selection, please refer to the following key parameters based on your actual requirements:

Maximum Travel

The first parameter listed for each series is the maximum travel achievable by the product. Select a product whose travel range fully covers your application requirements. The maximum travel is measured at the maximum driving voltage. For reliable long-term operation, please refer to the corresponding product page for recommended driving voltages and their corresponding travel ranges.

Resolution

The second parameter listed for each series is the product resolution. Resolution here refers to the minimum command increment for controlling the stage movement. For applications requiring repetitive positioning, closed-loop products are recommended, and the closed-loop linearity and closed-loop repeatability data should be referenced.

Maximum Load Capacity

The third parameter listed for each series is the horizontal maximum load capacity of the product. This determines the maximum weight of the sample that the stage can carry. Please select a product with a load capacity greater than your actual requirement. Note that some stage models support vertical and inverted mounting. The load capacity varies under different mounting conditions; please refer to the corresponding product page for detailed specifications.

Closed-loop Requirements

Based on whether sensors are integrated, our products are divided into open-loop and closed-loop versions, marked with the letters K (open-loop) and S (closed-loop) in the product part number respectively.

• Open-loop Products
  Open-loop stages are not equipped with sensors, eliminating the limitation of feedback frequency on response speed. The no-load step response time can be less than 1 ms. They feature a more compact structure and high cost-performance ratio. Suitable for experiments with low precision requirements but high priority on speed, such as ultrafast laser shutters and initial fiber coupling alignment.
• Closed-loop Products
  Closed-loop piezo stages are equipped with high-precision sensors for real-time position detection and feedback. When used with our piezo controllers, they enable precise displacement adjustment and nanometer-level positioning control with shorter settling time. Suitable for high-precision and high-repeatability applications, such as AFM scanning and micro-fabrication of surface structures. The built-in sensors include SGS, CAP, and LVDT types:
  • a. SGS is the most common closed-loop solution. It is extremely lightweight, has minimal impact on resonant frequency, offers high cost-performance ratio, and can be used in special environments such as vacuum and high magnetic fields.
  • b. CAP (capacitive sensor) measures displacement by detecting capacitance changes between plates. It provides higher resolution and linearity, ideal for applications demanding superior accuracy.
  • c. LVDT is an electromagnetic sensor that measures displacement via electromagnetic induction. It delivers excellent linearity in long-travel stages.

  Our closed-loop products mainly adopt the SGS solution. For customization of other closed-loop schemes, please contact us for further information.

  

With the information above, you can preliminarily select the required products. To further confirm the optimal model, you may also focus on the following parameters:

No-load Resonant Frequency

This refers to the natural mechanical resonant frequency of the piezo stage without any load, determined only by its structural mass and stiffness. In practice, the operating frequency is usually much lower than the no-load resonant frequency. The resonant frequency decreases significantly as the load increases. This parameter is critical for high-speed imaging applications, as it determines the imaging speed.

Closed-loop Linearity and Repeatability

• Closed-loop linearity describes the accuracy between the commanded motion and the actual motion under closed-loop control.
• Repeatability refers to the minimum deviation when reaching the same position multiple times.

Linearity reflects the motion accuracy of the product, while repeatability reflects its stability. Linearity is a key reference for quantitative measurement applications, while repeatability is more important for fixed-point detection applications.

Principle of Operation

The core driving source of the positioning stage is Piezoelectric Ceramics (stack actuators in some models), which operate based on the "Converse Piezoelectric Effect":

• When the controller outputs a specific voltage (typically 0–150V, up to 1000V for high-voltage models), the ceramic produces micro-mechanical deformation proportional to the voltage.
• This deformation serves as the primary motive power, which is either directly transmitted or mechanically amplified to achieve the target travel range.
• The high-response characteristics (frictionless, zero backlash) ensure millisecond or sub-millisecond response speeds.

Mechanical Structure Selection

Amplified Mechanism Design Designed for long-travel requirements. Flexure hinges amplify the micro-deformation of the ceramic by several to dozens of times, achieving travel ranges exceeding 100μm. The integrated flexure hinge structure, optimized via Finite Element Analysis (FEA), eliminates mechanical clearance and friction, ensuring high stiffness and load capacity.	Direct-Drive Mechanism Design Ideal for ultra-high precision and short-travel scenarios. The ceramic directly drives the platform without amplification, minimizing transmission errors. Offers exceptional resolution ranging from 0.1nm to 0.5nm.

Open and Closed Loop Control

The system achieves precision control through "Drive-Detect-Feedback" loops or simplified open-loop configurations:

• Open-loop Control
  • Logic: The controller outputs signals based on preset voltage-displacement curves without real-time position detection.
  • Application: Suitable for scenarios with lower requirements for repeatability; resolution is typically 1–5nm.
• Closed-loop Control
  • Logic: Integrated high-precision sensors detect actual platform displacement in real-time.
  • Feedback: Sensors convert displacement into electrical signals for the controller to dynamically adjust voltage, eliminating hysteresis, creep, and thermal drift.