The line scan confocal microscope (L series) is a powerful imaging tool that combines confocal microscopy principles with fast linear scanning capabilities. This innovative technology has revolutionized the testing of rapid events in materials science and microelectronics. Unlike traditional confocal microscopes, which capture images pixel by pixel, the line scan confocal microscope captures entire rows of information simultaneously, providing unmatched speed in detection, making it ideal for quick industrial inspections.

The core of the high-speed line scan confocal microscope lies in its ability to scan a laser or illumination along a line through the sample while simultaneously collecting emitted fluorescence or reflected light from that same line. This technology is unaffected by the intensity of reflected light, enabling high-precision detection of nearly any material. It effectively addresses challenges in industrial inspection, such as evaluating transparent objects, highly reflective surfaces, and strongly light-absorbing materials, opening new avenues for industrial testing.

Features

• High-speed acquisition  50fps@1024x1024 pixels.
• Single wavelength laser  supports 11 kinds of wavelength customization from UV to NIR.
• Large FOV（60X: 0.36mm, 40X: 0.54mm.
• Software function Large image Mosaic, 3D imaging rendering.
• High-speed line scan 100mm/s（Linewidth 1mm. 
• 3D depth of field fusion z-axis resolution 50nm.

High-speed acquisition (50fps@1024x1024 pixel)

Line-scan confocal microscopy is over 100 times faster than traditional methods. It reduces phototoxicity and photobleaching, making it great for observing time-based changes, like metal microstructures at high temperatures, and for quick industrial tests, such as detecting nanomaterials and welding defects.

Accurate surface analysis and non-contact inspection

The line scan confocal microscope can accurately reconstruct the 3D images of material surfaces, making it suitable for measuring parameters such as surface roughness, microstructure, and coating thickness. It operates without contacting the sample, preventing physical damage, which is particularly advantageous for fragile, soft, or difficult-to-reach samples, such as semiconductor wafers, microelectronic devices, and high-precision optical components.

Perfect industry high-speed and high-resolution solution

The wafer defect detection system identifies physical and pattern defects on wafers, providing their location coordinates (X, Y). Line-scan confocal technology speeds up detection time by more than 10 times.

• Line scanning speed: 100mm/s
• Line width: 1mm
• Defects can be detected on an 8-inch wafer in just 6 minutes

Micro-LED Slice surface
morphology scanning 

Micro-LED 3D Morphology detection

Micro LED Bonding gold wire depth chart

Micro LED Bonding gold wire
3D reconstruction

Mirco-LED-line scan result of gold line (raw picture)

Line-scan confocal microscopy provides high-resolution images of micro-LEDs, accurately revealing their light emission characteristics and surface structures. 

It also highlights defects in gold wires and fine details of the LEDs by scanning line-by-line. This technique is essential for improving manufacturing processes, enhancing display performance, and solving optical issues in micro-LED technology.

High-speed line scan
8-inch wafer surface detection

High-speed detection of
wafer surface defects

Wafer surface detection，20X Objective
diameter of microcrater 5.5 μm
diameter of defect 1.5 μm、
0.7 μm、0.65 μm

Wafer surface detection，20X Objective
diameter of defects 1.1μm、0.9 μm、
0.9 μm、0.45 μm

Sample depth map of metal step

3D morphology of metal samples

3D morphology analysis of metal samples

• High resolution：Measure depth and width accurately, analyzing micro details.
• Fast scan：One scan covers a large area, suitable for rapid detection of mass production.
• Non-contact：Not damage sample to ensure the reliability of the measurement.
• 3D morphology reconstruction：Generate 3D structure of notching line for detection.
• Automatic data process：Analize and generate report quickly, suitable for real-time quality control.
• Complex surface adaptation：Good adaptability to different materials and complex surfaces.

Laser control panel

XYZ motor table scanning parameter setting

Camera parameter setting

405/445/488

/525/561/640(nm)

405/445/488/

525/561/640(nm)

405/488/561/

640(nm)

405/445/488/

525/561/640(nm)

405/488/561/

640(nm)

405/445/470/520/

528/555/640(nm)

405/445/470/520/

528/555/640(nm)

405/445/470/520/

528/555/640(nm)

405/445/470/520/

528/555/640(nm)

Inverted or

Upright 

Inverted or

Upright 

Inverted or

Upright 

Z Motorized

XY Manual

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