Maskless Lithography UV Laser Writer | SIMTRUM Photonics Store

• Compact Full-featured maskless lithography, smaller than a desktop computer.
• Powerful Sub-micron resolution while exposes a writefield in less than two seconds.
• Ultrafast Autofocus Piezo actuators reach focus in less than a second when combined with our closed-looped focus optics.
• No-fuss Multilayer Semi-automatic alignment allows multilayer alignment to be completed within minutes.

Measurement Example

Software Features

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2. The included software makes quick work of any patterning job; just load, align and expose. Navigation is similar to CNC systems.
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4. During multilayer exposures, the GDS pattern is overlaid for visualization. The control GUI (left window) has a minimap of the loaded GDS that allows navigation to any area on the wafer with 1-click.

   Xplorer Main Window		Camera Window
   Acts as a minimap of the entire sample stage. Loaded patterns and exposed areas can be viewed. The black bos shows the regin that the BEAM ENGINE is currently at. The live video stream on the camera window also corresponds to the same area.		The camera window shows a live stream of what the BEAM ENGINE is looking at. The camera window also plays an important role during alignment, where the chosen alignment features appear overlaid on the amera stream.

Product Upgrade

DMD replaces laser galvanometers Interchangeable lens design (0.5 μm resolution or 200 mm²/min) True 8-bit grayscale lithography for advanced 2.5D and 3D microstructure fabrication Single writefield exposures as fast as 250 ms  Gradient stitching supports a maximum overlap rate of 100%  Low maintenance: Solid-state architecture reduces moving parts and wear. 80% reduction in required calibrations, minimizing downtime and maintenance costs

Specifications

Front View		Back View
	Modular Laser Head       Swappable optics minimizes downtime and increases upgradeability.       Customization options are available for different wavelengths and write        field sizes. Contact us info@simtrum.comfor more info.

System Requirements 

Power 

BEAM opeartes on 100-240 VAC 50-60j Hz. Line voltage and frequency are automatically sensed; therefore, no swithces are to be set. Check that the operating voltagein your area is compatible. 

Location 

●  Indoor, dust free, near-non-conductive pollution (degree 2 of EN61010-1:2010) 

●  Tabletop vibration should be kept under VC-A (50 um/s) 

●  Cleanroom environment is optional  (Vibration Reference link)

●  Equipment must be shaded from indirect sunlight 

●  Relative humidity < 80% (no condensation) 

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