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LL-LW-50

Linewidth: 0.5 μm ,Patterning Speed: 3 mm2/min

MODEL:LL-LW-50

6-10 Weeks Drawings

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* The prices are indicative only. Please contact us for an official quote. This is single product page, for detail specification please refer to product main page


Compare Model Drawings & Specs Availability Reference Price
LL-LW-405-6-0.8-Upgrade
Repeatability: 0.1 μm ,Stage Travel: 8"" ,Laser Wavelength: 405 nm (365/385 nm optional) ,Default Configuration: 20x. (0.8 μm, 15 mm²/min), Grayscale: 8-bit, 2K DMD resolution, Delivered with high performance laptop
6-10 Weeks Request for quote
LL-LW-405-4-1.5
Repeatability: 0.1 μm, Stage Travel: 4"" ,Laser Wavelength: 405 nm (365/385 nm optional) ,Default Configuration: 10x. (1.5 μm, 60 mm²/min) ,Grayscale: 8-bit, 2K DMD resolution ,Delivered with high performance laptop
6-10 Weeks Request for quote
LL-LW-405-6-0.8
Repeatability: 0.1 μm ,Stage Travel: 6"" (8"" optional) ,Laser Wavelength: 405 nm (365/385 nm optional) ,Default Configuration: 20x. (0.8 μm, 15 mm²/min), Grayscale: 8-bit, 2K DMD resolution ,Delivered with high performance laptop
6-10 Weeks Request for quote
LL-LW-405-4-0.8
Repeatability: 0.1 μm ,Stage Travel: 4"", 5"" compatible, Laser Wavelength: 405 nm (365/385 nm optional) ,Default Configuration: 20x. (0.8 μm, 15 mm²/min) ,Grayscale: 8-bit, 2K DMD resolution, Delivered with high performance laptop
6-10 Weeks Request for quote

Compatible

Compare Model Drawings & Specs Availability Reference Price
LL-LW-Vacuum
Perforated sample stage to allow for vacuum-based workholding, Vacuum pump not included
6-10 Weeks Request for quote
LL-LW-BSA
Only for LL-LW-405-6-0.8 ,Enables two-point alignment ,Alignment accuracy: < 2 um, Please confirm microscope placement before placing order
6-10 Weeks Request for quote
LL-LW-20
Linewidth: 0.8 μm, Patterning Speed: 15 mm2/min
6-10 Weeks Request for quote
LL-LW-10
Linewidth: 1.5 μm ,Patterning Speed: 60 mm2/min
6-10 Weeks Request for quote
LL-LW-5
Linewidth: 3 μm ,Patterning Speed: 200 mm2/min
6-10 Weeks Request for quote
LL-LW-2.5
Linewidth: 6 μm
6-10 Weeks Request for quote
LL-LW-Upgrade
Dual Light Source: 405 nm+365 nm (Software selectable) ,Grayscale: 16-bit, 3K DMD resolution
6-10 Weeks Request for quote

Product Upgrade

  • DMD replaces laser galvanometers
  • True 8-bit grayscale lithography for advanced 2.5D and 3D microstructure fabrication
  • Interchangeable lens design (0.5 μm resolution or 200 mm²/min) Single writefield exposures as fast as 250 ms 
  • Gradient stitching supports a maximum overlap rate of 100% 
  • Low maintenance: Solid-state architecture reduces moving parts and wear. 80% reduction in required calibrations, minimizing downtime and maintenance costs

 

Specifications

Product Model  LL-LW-405-4-0.8* LL-LW-405-6-0.8*
Repeatability  0.1 μm
Autofocus  Piezo-actuated; fast and precise (20 nm) focus
Compatible with most transparent substrates 
Wafer Alignment  Automatic Wafer Alignment 
Topside only  Topside and buttom (optional) 
Maximum Writing Area  106×106 mm 150×150 mm (8”optional)
Maximum Sample Size  130 mm ✕ 130 mm ( 5”compatible) 155 mm ✕ 155 mm ( 6”compatible)
Sample Mounting  Friction mount (optional: porous vaccum chuck)
Weight 20 kg 27 kg
System Size  330×310×340 mm 342×385×338 mm
Objectives   50× 20×* 10×*
Minumum Linewidth (μm)  0.5 0.8 1.5 3
Patterning Speed (mm2/min)  3 15 60 200
Laser Exposure Wavelength (nm)  405 nm (365/385 nm optional)
Software-selectable Dual Wavelength (optional)
Grayscale  8-bit (16-bit optional)
Software Accepted File Formats  .bmp, .png, .tiff, .dxf, .gds
Patterns can directly be drawn in software
Patterning  Beam Xplorer
Drawing KLayout (most powerful), AutoCAD 
 
*For LL-LW-405-4-0.8 and LL-LW-405-6-0.8 products, the standard configuration includes a 20× objective lens. For other objective lenses (e.g., 50×), please contact SIMTRUM.
*For the LL-LW-405-4-1.5 (cost-effective) product, a 10× objective lens is standard. For other objective lenses (e.g., 5×), please contact SIMTRUM.

 

LL-LW-Vacuum - Parameter

LL-LW-BSA - Parameter

LL-LW-50 - Parameter

LL-LW-20 - Parameter

LL-LW-10 - Parameter

LL-LW-5 - Parameter

LL-LW-2.5 - Parameter

LL-LW-Upgrade - Parameter

LL-LW-405-6-0.8-Upgrade - Parameter

LL-LW-405-4-1.5 - Parameter

LL-LW-405-6-0.8 - Parameter

LL-LW-405-4-0.8 - Parameter

LL-LW-Vacuum - Download

LL-LW-BSA - Download

LL-LW-50 - Download

LL-LW-20 - Download

LL-LW-10 - Download

LL-LW-5 - Download

LL-LW-2.5 - Download

LL-LW-Upgrade - Download

LL-LW-405-6-0.8-Upgrade - Download

LL-LW-405-4-1.5 - Download

LL-LW-405-6-0.8 - Download

LL-LW-405-4-0.8 - Download