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Products / Opto-Mechanics /Motorized Piezo Stage(high-precision) /Piezo Nano Hollow Stage / OM-PHTS-H5-100-3-0.6-D35-S /

Piezo Nano Hollow Stage, XYZ-axis, Stroke 100 μm/axis, Through-hole dimension Φ35mm, Resonant Frequency X0.23/Y0.18/Z0.15 kHz, Resolution 3 nm, Closed Loop

MODEL:OM-PHTS-H5-100-3-0.6-D35-S

6-8 weeks Drawings

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* The prices are indicative only. Please contact us for an official quote. This is single product page, for detail specification please refer to product main page

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OM-PHTS-H5-100-3-0.6-D25-S Piezo Nano Hollow Stage, XYZ-axis, Stroke 100 μm/axis, Through-hole dimension Φ25mm, Resonant Frequency X0.23/Y0.18/Z0.15 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H5-100-1-0.6-D35-K Piezo Nano Hollow Stage, XYZ-axis, Stroke 100 μm/axis, Through-hole dimension Φ35mm, Resonant Frequency X0.23/Y0.18/Z0.15 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H5-100-1-0.6-D25-K Piezo Nano Hollow Stage, XYZ-axis, Stroke 100 μm/axis, Through-hole dimension Φ25mm, Resonant Frequency X0.23/Y0.18/Z0.15 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H5-200-5.5-0.3-S45-S Piezo Nano Hollow Stage, XYZ-axis, Stroke 200 μm/axis, Through-hole dimension 45×45mm, Resonant Frequency X0.15/Y0.13/Z0.09 kHz, Resolution 5.5 nm, Closed Loop	6-8 weeks	Request for quote
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OM-PHTS-H4-100-1-0.6-D35-K Piezo Nano Hollow Stage, XZ-axis, Stroke 100 μm/axis, Through-hole dimension Φ35mm, Resonant Frequency 0.2 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
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OM-PHTS-H3-100-1-0.7-D35-K Piezo Nano Hollow Stage, XY-axis, Stroke 100 μm/axis, Through-hole dimension Φ35mm, Resonant Frequency X0.18/Y0.23 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H3-100-1-0.7-D25-K Piezo Nano Hollow Stage, XY-axis, Stroke 100 μm/axis, Through-hole dimension Φ25mm, Resonant Frequency X0.18/Y0.23 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
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OM-PHTS-H2-43-1.5-3-D65-S Piezo Nano Hollow Stage, Z-axis, Stroke 43 μm, Through-hole dimension Φ65mm, Resonant Frequency 1.4 kHz, Resolution 1.5 nm, Closed Loop	6-8 weeks	Request for quote
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OM-PHTS-H2-200-5.5-0.5-D35-S Piezo Nano Hollow Stage, Z-axis, Stroke 200 μm, Through-hole dimension Φ35mm, Resonant Frequency 0.15 kHz, Resolution 5.5 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H2-200-2-0.5-D35-K Piezo Nano Hollow Stage, Z-axis, Stroke 200 μm, Through-hole dimension Φ35mm, Resonant Frequency 0.15 kHz, Resolution 2 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H2-200-2-0.5-D25-K Piezo Nano Hollow Stage, Z-axis, Stroke 200 μm, Through-hole dimension Φ25mm, Resonant Frequency 0.15 kHz, Resolution 2 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H2-100-3-0.8-D25-S Piezo Nano Hollow Stage, Z-axis, Stroke 100 μm, Through-hole dimension Φ25mm, Resonant Frequency 0.22 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H2-100-3-0.8-D35-S Piezo Nano Hollow Stage, Z-axis, Stroke 100 μm, Through-hole dimension Φ35mm, Resonant Frequency 0.22 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H2-100-1-0.8-D25-K Piezo Nano Hollow Stage, Z-axis, Stroke 100 μm, Through-hole dimension Φ25mm, Resonant Frequency 0.22 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H2-100-1-0.8-D35-K Piezo Nano Hollow Stage, Z-axis, Stroke 100 μm, Through-hole dimension Φ35mm, Resonant Frequency 0.22 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H2-200-5.5-0.5-S45-S Piezo Nano Hollow Stage, Z-axis, Stroke 200 μm, Through-hole dimension 45×45mm, Resonant Frequency 0.16 kHz, Resolution 5.5 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H2-200-2-0.5-S45-K Piezo Nano Hollow Stage, Z-axis, Stroke 200 μm, Through-hole dimension 45×45mm, Resonant Frequency 0.16 kHz, Resolution 2 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H2-100-3-0.7-S45-S Piezo Nano Hollow Stage, Z-axis, Stroke 100 μm, Through-hole dimension 45×45mm, Resonant Frequency 0.2 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H2-100-1-0.7-S45-K Piezo Nano Hollow Stage, Z-axis, Stroke 100 μm, Through-hole dimension 45×45mm, Resonant Frequency 0.2 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H1-100-3-0.8-D35-S Piezo Nano Hollow Stage, X-axis, Stroke 100 μm, Through-hole dimension Φ35mm, Resonant Frequency 0.23 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H1-100-3-0.8-D25-S Piezo Nano Hollow Stage, X-axis, Stroke 100 μm, Through-hole dimension Φ25mm, Resonant Frequency 0.23 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H1-100-1-0.8-D35-K Piezo Nano Hollow Stage, X-axis, Stroke 100 μm, Through-hole dimension Φ35mm, Resonant Frequency 0.23 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H1-100-1-0.8-D25-K Piezo Nano Hollow Stage, X-axis, Stroke 100 μm, Through-hole dimension Φ25mm, Resonant Frequency 0.23 kHz, Resolution 1 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H1-200-5.5-0.5-S45-S Piezo Nano Hollow Stage, X-axis, Stroke 200 μm, Through-hole dimension 45×45mm, Resonant Frequency 0.16 kHz, Resolution 5.5 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H1-200-2-0.5-S45-K Piezo Nano Hollow Stage, X-axis, Stroke 200 μm, Through-hole dimension 45×45mm, Resonant Frequency 0.16 kHz, Resolution 2 nm, Open Loop	6-8 weeks	Request for quote
OM-PHTS-H1-100-3-0.7-S45-S Piezo Nano Hollow Stage, X-axis, Stroke 100 μm, Through-hole dimension 45×45mm, Resonant Frequency 0.23 kHz, Resolution 3 nm, Closed Loop	6-8 weeks	Request for quote
OM-PHTS-H1-100-1-0.7-S45-K Piezo Nano Hollow Stage, X-axis, Stroke 100 μm, Through-hole dimension 45*45mm, Resonant Frequency 0.23 kHz, Resolution 1 nm, Closed Loop	6-8 weeks	Request for quote

Compatible

Compare	Model		Drawings & Specs	Availability	Reference Price

Product Specifications

Parameter	OM-PHTS-H5-100-1-0.6-D25-K	OM-PHTS-H5-100-1-0.6-D25-K	OM-PHTS-H5-100-3-0.6-D35-S	OM-PHTS-H5-100-1-0.6-D35-K	Unit
Through-hole Size	Ø25	Ø25	Ø35	Ø35	mm
Motion Freedom	X, Y, Z	X, Y, Z	X, Y, Z	X, Y, Z	-
Drive Control	3-ch drive / 3-ch sensor	3-ch drive	3-ch drive / 3-ch sensor	3-ch drive	-
Nominal Travel (0~120V)	80	80	80	80	μm±10%/axis
Max Travel（0~150V）	100	100	100	100	μm±10%/axis
Resolution	3	1	3	1	nm
Closed-loop Linearity	0.1	-	0.1	-	%F.S.
Push / Pull Force	20 / 4	20 / 4	20 / 4	20 / 4	N
Motion Direction Stiffness	X0.3/Y0.25/Z0.2	X0.3/Y0.25/Z0.2	X0.3/Y0.25/Z0.2	X0.3/Y0.25/Z0.2	N/μm±20%
No-load Resonant Frequency	X230/Y180/Z150	X230/Y180/Z150	X230/Y180/Z150	X230/Y180/Z150	Hz±20%
Load (Horiz./Vert./Inv.)	0.6 / 0.03 / 0.03	0.6 / 0.03 / 0.03	0.6 / 0.03 / 0.03	0.6 / 0.03 / 0.03	kg
Weight	260	260	260	260	g±5%